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专利名称：AN IMAGE SENSOR, AN INSPECTION
SYSTEM AND A METHOD OF INSPECTINGAN ARTICLE
发明人：CHUANG, Yung-Ho Alex,ZHANG,
Jingjing,FIELDEN, John
申请号：EP15765881.6申请日：20150313公开号：EP3120382A4公开日：20171025
摘要：A high sensitivity image sensor comprises an epitaxial layer of silicon that isintrinsic or lightly p doped (such as a doping level less than about 1013 cm−3). CMOS orCCD circuits are fabricated on the front-side of the epitaxial layer. Epitaxial p and n typelayers are grown on the backside of the epitaxial layer. A pure boron layer is depositedon the n-type epitaxial layer. Some boron is driven a few nm into the n-type epitaxiallayer from the backside during the boron deposition process. An anti-reflection coatingmay be applied to the pure boron layer. During operation of the sensor a negative biasvoltage of several tens to a few hundred volts is applied to the boron layer to acceleratephoto-electrons away from the backside surface and create additional electrons by anavalanche effect. Grounded p-wells protect active circuits as needed from the reversedbiased epitaxial layer.
申请人：Kla-Tencor Corporation
地址：One Technology Drive Milpitas, California 95035 US
国籍：US
代理机构：FRKelly
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