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System and method for interferometric measurement

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专利名称:System and method for interferometric

measurement of aspheric surfaces utilizingtest plate provided with computer-generated hologram

发明人:James H. Burge,David S. Anderson申请号:US08/682387申请日:19960717公开号:US05737079A公开日:19980407

摘要:An interferometer including a test plate member having a computer- generatedhologram (CGH) written on the reference surface. In a preferred testing configuration,the interferometer setup includes a laser light source, diverger lens, beamsplitters,collimators, and other auxiliary optics arranged in a common-path (Fizeau-type)configuration to minimize measurement errors for testing an optical test piece with thetest plate member having the computer-generated hologram. By having the computer-generated hologram written directly on the reference surface of the test plate member,the measurement of aspheric optical surfaces is made with greater precision, moreefficient, and with less cost than prior art interferometers and associated methods.

申请人:RAYLEIGH OPTICAL CORPORATION

代理机构:Benman & Collins

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