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专利名称：Methods of forming a plurality of capacitors发明人：Fred D. Fishburn申请号：US12823797申请日：20100625公开号：US08163613B2公开日：20120424
专利附图：
摘要：A method of forming a plurality of capacitors includes forming a plurality ofindividual capacitor electrodes using two masking steps. An earlier of the two maskingsteps is used to form an array of first openings over a plurality of storage node contacts.A later of the two masking steps is used to form an array of second openings received
partially over and partially offset from the array of first openings. Overlapping portionsof the first and second openings are received over the storage node contacts. After bothof the two masking steps, conductive material of the individual capacitor electrodes isdeposited into the overlapping portions of each of the first and second openings. Theindividual capacitor electrodes are incorporated into a plurality of capacitors. Otheraspects and implementations are contemplated.
申请人：Fred D. Fishburn
地址：Manassas VA US
国籍：US
代理机构：Wells St. John, P.S.
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