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SEMICONDUCTOR MICRO-ANALYSIS CHIP AND METHOD OF MA

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专利名称:SEMICONDUCTOR MICRO-ANALYSIS CHIP

AND METHOD OF MANUFACTURING THESAME

发明人:Hiroko MIKI,Hideto FURUYAMA,Kentaro

KOBAYASHI,Akihiro KOJIMA

申请号:US14198425申请日:20140305

公开号:US20150041316A1公开日:20150212

专利附图:

摘要:One of embodiments is a semiconductor micro-analysis chip for detecting

particles in a sample liquid. The chip comprises a semiconductor substrate, a first flowchannel provided on the semiconductor substrate to allow the sample liquid to flowtherein, a second flow channel provided at a different position from the first flow channelof the semiconductor substrate to allow the sample liquid or an electrolyte solution toflow therein, a contact portion where a portion of the first flow channel and a portion ofthe second flow channel abut each other or intersect one another with a partition beingarranged between the flow channels, and a fine hole provided on the partition of thecontact portion to allow the particles to pass therethrough.

申请人:KABUSHIKI KAISHA TOSHIBA

地址:Tokyo JP

国籍:JP

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