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专利名称：Trend monitoring and diagnostic analysis
method and system for failure protectionand for predictive maintenance of a vacuumpump
发明人：Wan Sup Cheung,Jong Yeon Lim,Kwang Hwa
Chung,Soo Gab Lee
申请号：US11721939申请日：20041217公开号：US076618B2公开日：20100216
专利附图：
摘要：The present invention such as active diagnostic algorithms is developed notonly to realize the early detection of degraded vacuum pumps for the protection ofpump failure but also to provide their predictive maintenance. According to the presentinvention, it is possible to find simple and effective ways to deal with technical problemsarising from the large variability of the pump-by-pump operation characteristics and themultiple process conditions where pumps run under the idle operation and gas-loadedoperation conditions alternately, especially in semiconductor manufacturing process.
申请人：Wan Sup Cheung,Jong Yeon Lim,Kwang Hwa Chung,Soo Gab Lee
地址：Daejeon KR,Daejeon KR,Daejeon KR,Seoul KR
国籍：KR,KR,KR,KR
代理机构：Steptoe & Johnson LLP
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